Abstract
The development of high aspect ratio polymer (HARP) microstructures, 3-D microstereolithography, freestanding cantilevers of polymers, and a selective hermetic sealing are presented for a transparent fluoropolymer based microfluidic system. As the adhesion of microstructures is an important failure mechanism in surface micromachined devices, solving surface interface problems between the wall of microchannel and complex biofluid is a critical issue in bioMEMS. Fluoropolymers are not only inert to most solvents and chemicals, but also have low surface energy and high biocompatibility. These characteristics of fluoropolymers offer significant advantages for developing fast biofluidic analytic systems with micro-scale ‘labs on chip’ integration.
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© 1998 Springer Science+Business Media Dordrecht
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Lee, L.P., Berger, S.A., Pruitt, L., Liepmann, D. (1998). Key Elements of A Transparent Teflon® Microfluidic System. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_58
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DOI: https://doi.org/10.1007/978-94-011-5286-0_58
Publisher Name: Springer, Dordrecht
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