Abstract
In this paper, new possibilities are shown to fabricate micro structures with use of a simple anisotropic wet chemical etching method. The method is very accurate, cheap and puts low demands on cleanroom facilities. Due to the possibility to obtain structures like valves which have their entrance and exit channels in one wafer in-line, the method might be very valuable for integration of different fluid handling components such as valves, channels and pumps. Several structures are fabricated and a summation of other possible designs is given. These show that exploitation of the well-known anisotropic etching methods in alkaline solutions can result in more sophisticated structures than used up to now.
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References
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© 1998 Springer Science+Business Media Dordrecht
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Oosterbroek, R.E., Berenschot, J.W., Schlautmann, S., Lammerink, T.S.J., van den Berg, A., Elwenspoek, M.C. (1998). Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_33
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DOI: https://doi.org/10.1007/978-94-011-5286-0_33
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6225-1
Online ISBN: 978-94-011-5286-0
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