Abstract
Electrochemical etching of silicon results in the formation of porous silicon or the electropolishing of the silicon, depending on the current density during etching. Using alternatingly high and low current densities we have been able to make so-called Multi Walled Micro Channels (MWμC’s) from p-type silicon. MWμC’s are microchannels containing one or more free-standing layers of porous silicon separating several coaxial channels. These channels can be used in many devices, for instance microsieves, microbatteries, or porous electrodes.
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© 1998 Springer Science+Business Media Dordrecht
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Tjerkstra, R.W., Gardeniers, J.G.E., Elwenspoek, M.C., van den Berg, A. (1998). Electrochemical Fabrication of Multi Walled Micro Channels. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_32
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DOI: https://doi.org/10.1007/978-94-011-5286-0_32
Publisher Name: Springer, Dordrecht
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