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Micro Total Analysis Systems ’98 pp 57–60Cite as

An Electronic Nose Based on A Micromechanical Cantilever Array

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Abstract

We present a novel chemical sensor based on a micromechanical array of silicon cantilevers sensitized for the detection of analytes using cantilever coatings such as metals, self-assembled monolayers, or polymers. Chemical reactions are transduced into a mechanical response and read out using an optical beam-deflection technique. Detection of primary alcohols, natural flavors, and water vapor is demonstrated.

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Author information

Authors and Affiliations

  1. IBM Research Division, Zurich Research Laboratory, Säumerstrasse 4, CH-8803, Rüschlikon, Switzerland

    H. P. Lang, M. K. Baller, R. Berger, C. Andreoli, J. Brugger, M. Despont, P. Vettiger, Ch. Gerber & J. K. Gimzewski

  2. Institute of Physics, University of Basel, Klingelbergstrasse 82, CH-4056, Basel, Switzerland

    H. P. Lang, F. M. Battiston, M. K. Baller, R. Berger, J.-P. Ramseyer, P. Fornaro, E. Meyer & H.-J. Güntherodt

  3. Paul Scherrer Institute, Laboratory for Micro- and Nanostructures, CH-5232, Villigen-PSI, Switzerland

    J.-H. Fabian, T. Mezzacasa & L. Scandella

Authors
  1. H. P. Lang
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  2. F. M. Battiston
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  3. M. K. Baller
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  4. R. Berger
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  5. J.-P. Ramseyer
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  6. P. Fornaro
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  7. E. Meyer
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  8. H.-J. Güntherodt
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  9. C. Andreoli
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  10. J. Brugger
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  11. M. Despont
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  12. P. Vettiger
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  13. J.-H. Fabian
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  14. T. Mezzacasa
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  15. L. Scandella
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  16. Ch. Gerber
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  17. J. K. Gimzewski
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Editor information

Editors and Affiliations

  1. Department of Chemistry, University of Alberta, Edmonton, Canada

    D. Jed Harrison

  2. MESA Research Institute, University of Twente, Enschede, The Netherlands

    Albert van den Berg

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© 1998 Springer Science+Business Media Dordrecht

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Cite this paper

Lang, H.P. et al. (1998). An Electronic Nose Based on A Micromechanical Cantilever Array. In: Harrison, D.J., van den Berg, A. (eds) Micro Total Analysis Systems ’98. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5286-0_13

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  • DOI: https://doi.org/10.1007/978-94-011-5286-0_13

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6225-1

  • Online ISBN: 978-94-011-5286-0

  • eBook Packages: Springer Book Archive

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