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Surface Micromachining and Electrical Characterization of Polysilicon Microcantilevers

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Microelectronics Education

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Abstract

The surface micromachining and the electrical characterization of polysilicon microcantilevers are presented as practical works, conceived as an introduction to MicroElectroMechnicalSystems (MEMS), for students in electrical engineering at the National Polytechnic Institute of Grenoble, France. The aim of these practical works is to illustrate the total compatibility of sensor and actuator technology with MOS integrated circuits.

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References

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Author information

Author notes

  1. A. M. Ionescu

    Present address: LETI-CEA, Grenoble, France

Authors and Affiliations

  1. ENSERG-INPG, 23, rue des Martyrs, BP 257, 38016, Grenoble, France

    A. M. Ionescu, P. Morfouli, N. Mathieu, J. Brini & N. Guillemot

  2. CIME-INPG, 46, avenue Félix Viallet, Grenoble, France

    N. Guillemot & J.-M. Terrot

Authors
  1. A. M. Ionescu
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  2. P. Morfouli
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  3. N. Mathieu
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  4. J. Brini
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  5. N. Guillemot
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  6. J.-M. Terrot
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Editor information

Editors and Affiliations

  1. MESA Research Institute, University of Twente, Enschede, The Netherlands

    Ton J. Mouthaan  & Cora Salm  & 

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© 1998 Springer Science+Business Media Dordrecht

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Ionescu, A.M., Morfouli, P., Mathieu, N., Brini, J., Guillemot, N., Terrot, JM. (1998). Surface Micromachining and Electrical Characterization of Polysilicon Microcantilevers. In: Mouthaan, T.J., Salm, C. (eds) Microelectronics Education. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5110-8_22

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  • DOI: https://doi.org/10.1007/978-94-011-5110-8_22

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6147-6

  • Online ISBN: 978-94-011-5110-8

  • eBook Packages: Springer Book Archive

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