Abstract
Tribological issues have received little attention in microfabricated system. Although work on miniature mechanical devices was initiated in the early 1970’s with the suspended beam and rotating electrostatic motor, issues of surface interactions in these structures has prevented their reliable operation. The application of the technology for the miniaturization of integrated circuits has also found utility in the miniaturization of chemical analysis systems (Manz et al., 1995). Semi-automated chemical analysis systems have been commercialized (Ruzicka and Hansen, 1988) and the key advantages of further reduction in size is the higher through-put of analyses can be achieved resulting in lower cost per analysis. Therefore application of microfabrication technologies facilitates the fabrication of miniature analysis systems. Furthermore, the economic benefits from batch fabrication processes will make miniature, light weight, portable, low cost analysis systems possible. In fluidic devices, the range of scaling does not offer the benefits as the volume of analyte becomes too small. Two issues arise, that of increased surface tension and pressure drop in miniature channels, and the fact that statistically there needs to be enough of the analyte molecule for the sensor to function. Many assays in biomedical analysis are at low concentration and hence volumes of at least 10 nL are required. The issues of control of sample volume without loss due to evaporation and sample reproducibility are important to solve in designing these systems. Miniature fluid handling systems can be applied to a variety of applications. Those in which the fluid is the primary component in microdialysis and drug delivery, for miniature hydraulics for the transmission of power, and in precision manufacturing for dispensing fluids in a controlled manner. The range of chemical analysis systems that can be miniaturized is likewise very broad.
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© 1998 Springer Science+Business Media Dordrecht
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Hesketh, P.J. et al. (1998). Biosensors and Microfluidic Systems. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_6
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DOI: https://doi.org/10.1007/978-94-011-5050-7_6
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