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Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques

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Tribology Issues and Opportunities in MEMS
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Abstract

This group consisted of scientists and engineers with diverse training and from varied working environments. There was a good mix of scientists and engineers, tribologists and MEMS specialists, and researchers from universities, industry and government laboratories. As a result, the discussion ranged widely. Discussion in the afternoon session returned to some of the topics highlighted in the morning, e.g., stiction and characterization, but with the addition of new opinions provided by a number of newcomers to the session.

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© 1998 Springer Science+Business Media Dordrecht

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Rigney, D.A. (1998). Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_49

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  • DOI: https://doi.org/10.1007/978-94-011-5050-7_49

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6121-6

  • Online ISBN: 978-94-011-5050-7

  • eBook Packages: Springer Book Archive

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