Abstract
We have investigated the lubricating effects of alkylsiloxane and fluoroalkylsiloxane self-assembled monolayers (SAMs) by measuring static friction in a poly-crystalline silicon (polysilicon) surface-micromachined device. This test structure, based on the design of Lim et al. [1], was fabricated in a four-mask process and coated with SAMs following the release etch. The coefficient of static friction, µs, was found to decrease from 2.3 ± 0.8 for the SiO2 coating to 0.13 ± 0.01 and 0.10 ± 0.007 for the octadecyltrichlorosilane (OTS) and 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) SAM films, respectively. A similar trend has been observed for the apparent works of adhesion of these coatings. Low standard deviations in the µs data for SAM treatments indicate uniform coating coverage. The µs values were shown to be independent of apparent contact area for the three surface coatings.
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Srinivasan, U., Howe, R.T., Maboudian, R. (1998). Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_45
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DOI: https://doi.org/10.1007/978-94-011-5050-7_45
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