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Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope

Mechanisms, Models and Micro- versus Macrotests

  • Conference paper
Tribology Issues and Opportunities in MEMS

Abstract

Metal containing amorphous hydrocarbon films (Me-C:H) consist of nanometer sized metallic particles embedded in a highly cross-linked hydrocarbon matrix. The coatings have excellent tribological properties and an adjustable electrical conductivity, therefore being of high interest for applications in MEMS devices. In this study microtribological properties of tungsten-C:H and gold-C:H films with metal contents ranging from 0 to 50 at% have been investigated by means of atomic force microscopy (AFM) methods. Friction force microscopy experiments have been performed and the load dependence of friction was analysed by means of Hertz theory of elastic contact. This analysis results in effective friction coefficients µ*=Ffrict/(RtipFload)2/3 ~ S•E* -2/3 (E* = red. Young’s modulus) which are used to determine shear stress S as a function of metal content and type of metal in the film. Comparison with results from macroscopic pin-on-disk tests shows a strong correlation with start values of friction, before wear or material transfer begin to influence frictional behaviour.

Microwear tests have been performed, using a diamond tip on a stainless steel cantilever. Real-time observation of the wear process shows periodic material break-off after a critical number of wear cycles, indicating material fatigue as an important wear mechanism. A strong influence of the columnar growth structure and the percolation of metallic nanoparticles inside the film on fatigue and wear resistance was found. Load dependence and time dependence of wear have been studied and described by simple models considering low cycle fatigue, mechanical properties of the film and change of contact area respectively. A reasonable fit of experimental data is obtained and fit parameter are in the order of magnitude predicted by the model. Microscopic (AFM) and macroscopic (pinon-disk) wear tests partly show comparable results. Differences are attributed to different effective contact pressures due to abrasive particles in the interface during the pin-on-disk test.

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Authors and Affiliations

  1. Fraunhofer Institut für Schicht- und Oberflächentechnik, Bienroder Weg 54E, D-38108, Braunschweig, Germany

    K. I. Schiffmann

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  1. K. I. Schiffmann
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Editors and Affiliations

  1. Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio, USA

    Bharat Bhushan

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Schiffmann, K.I. (1998). Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_40

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  • DOI: https://doi.org/10.1007/978-94-011-5050-7_40

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6121-6

  • Online ISBN: 978-94-011-5050-7

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