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Mechanical Property Determination Using Nanoindentation Techniques

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Tribology Issues and Opportunities in MEMS

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Abstract

Data obtained from indentation testing can provide important information about the near-surface mechanical properties and deformation behavior of solids. Properly executed and interpreted, the technique can provide information regarding hardness, elastic modulus, compressive yield strength (metals), fracture toughness (ceramics) and residual stresses. The apparent simplicity of the test procedure, however, often belies the difficulties of interpreting the data to give quantitative information on properties of interest for a specific application.

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Authors and Affiliations

  1. Center for Materials Processing, University of Tennessee, Knoxville, TN, 37996-2350, USA

    Carl J. McHargue

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  1. Carl J. McHargue
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Editor information

Editors and Affiliations

  1. Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio, USA

    Bharat Bhushan

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© 1998 Springer Science+Business Media Dordrecht

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McHargue, C.J. (1998). Mechanical Property Determination Using Nanoindentation Techniques. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_36

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  • DOI: https://doi.org/10.1007/978-94-011-5050-7_36

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6121-6

  • Online ISBN: 978-94-011-5050-7

  • eBook Packages: Springer Book Archive

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