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Development, Fabrication and Testing of a Multi-Stage Micro Gear System

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Tribology Issues and Opportunities in MEMS

Abstract

There is a general trend towards miniaturization of technical systems. Over the last few decades the development of microelectronics has led to the integration of more and more functions into compact appliances. The same is now happening in microtechnology, i. e. the miniaturization and integration of mechanical systems such as drives. For many applications e. g. in medicine, drives with an outer diameter in the millimeter range and torques of more than 0.1 mNm are required. Drives in this context are a combination of motor and gearbox.

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References

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© 1998 Springer Science+Business Media Dordrecht

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Thürigen, C., Ehrfeld, W., Hagemann, B., Lehr, H., Michel, F. (1998). Development, Fabrication and Testing of a Multi-Stage Micro Gear System. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_27

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  • DOI: https://doi.org/10.1007/978-94-011-5050-7_27

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-6121-6

  • Online ISBN: 978-94-011-5050-7

  • eBook Packages: Springer Book Archive

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