Abstract
There is a general trend towards miniaturization of technical systems. Over the last few decades the development of microelectronics has led to the integration of more and more functions into compact appliances. The same is now happening in microtechnology, i. e. the miniaturization and integration of mechanical systems such as drives. For many applications e. g. in medicine, drives with an outer diameter in the millimeter range and torques of more than 0.1 mNm are required. Drives in this context are a combination of motor and gearbox.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
W. Ehrfeld, H. Lehr: Deep X-Ray Lithographie for the Production of three-dimensional Microstructures from Metals,Polymers and Ceramics, Radiation Physics and Chemistry, 1995
B. Hagemann: Entwicklung von Permanentmagnet-Mikromotoren mit Luftspaltwicklung, theses, university of Hannover, Germany, to be published
W. Krause: Konstruktionselemente der Feinwerktechnik, Carl Hanser Verlag, München, Wien, 1993
J. Legler: Leistungsverhalten von hochübersetzenden Stirnradgetrieben und Räderketten der Gerätetechnik, theses, TU Dresden 1989.
F. A. Stadler: Spritzenleistungen in der klassischen Mikrobearbeitung - eine Frage der Geisteshaltung, Tagungsband Micro-Engineering 96, Stuttgart, 1996
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Thürigen, C., Ehrfeld, W., Hagemann, B., Lehr, H., Michel, F. (1998). Development, Fabrication and Testing of a Multi-Stage Micro Gear System. In: Bhushan, B. (eds) Tribology Issues and Opportunities in MEMS. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5050-7_27
Download citation
DOI: https://doi.org/10.1007/978-94-011-5050-7_27
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6121-6
Online ISBN: 978-94-011-5050-7
eBook Packages: Springer Book Archive