Influence of Substrate Voltage on Sensitivity and Offset of (Spinning-Current) Hall Plates

Abstract

Hall sensors are used for the measurement of magnetic fields and for the indirect measurement of mechanical quantities. Traditional Hall plates show a large, unpredictable offset, making them less suited for applications involving small magnetic fields. To reduce the offset of Hall plates, Munter introduced the so-called spinning-current principle [1]. Using this principle he successfully reduced the offset of Hall plates. The research into these spinning-current Hall plates concentrates on the influence of important parameters like temperature, substrate voltage, mechanical stress, etc. on the properties of these Hall plates. In this paper the influence of the substrate voltage on the sensitivity and offset of spinning-current Hall plates is discussed.