Abstract
This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve.
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© 1998 Springer Science+Business Media Dordrecht
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Oosterbroek, R.E., Berenschot, J.W., Schlautmann, S., Lammerink, T.S.J., van den Berg, A., Elwenspoek, M.C. (1998). A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems. In: van den Berg, A., Bergveld, P. (eds) Sensor Technology in the Netherlands: State of the Art. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-5010-1_13
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DOI: https://doi.org/10.1007/978-94-011-5010-1_13
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-6103-2
Online ISBN: 978-94-011-5010-1
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