Abstract
We first present a new kind of CVD reactor using a new liquid delivery system which is called injection — CVD. Its principle is based on controlled injection of micro-amounts of solution containing the precursors and leads to precise control of the precursors vapour.
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© 1999 Springer Science+Business Media Dordrecht
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Pignard, S. et al. (1999). Hexaferrite and Manganite Films Obtained by Injection - MOCVD Process. In: Nedkov, I., Ausloos, M. (eds) Nano-Crystalline and Thin Film Magnetic Oxides. NATO Science Series, vol 72. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-4493-3_4
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DOI: https://doi.org/10.1007/978-94-011-4493-3_4
Publisher Name: Springer, Dordrecht
Print ISBN: 978-0-7923-5873-2
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