Abstract
Piezoelectric films have great potentials for applications in actuators, optoelectronics and integrated circuits for devices such as infrared detectors, surface acoustic wave devices, and so on. Inorganic/organic hybrid materials attract great attentions because of novel functionality as well as the combination of beneficial properties of each component. Tetragonal PbTiO3 particles/organic hybrids were successfully synthesized by the reaction control of the specifically designed metal-organic precursor below 100°C. The demand for processing piezoelectric ceramics of sub-micron meter to 10 µm thick films has also been raised because of the functionality integration and improvement in performance. This paper reviews our recent results on the chemical processing of PbTiO3/ organic hybrid and Pb(Zr,Ti)O3 thick films.
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© 2000 Springer Science+Business Media Dordrecht
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Hirano, S., Yogo, T., Sakamoto, W., Yamaguchi, H. (2000). Chemical Processing of PbTiO3/Organic Hybrid and Pb(Zr,Ti)O3 Thick Films. In: Galassi, C., Dinescu, M., Uchino, K., Sayer, M. (eds) Piezoelectric Materials: Advances in Science, Technology and Applications. NATO Science Series, vol 76. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-4094-2_12
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DOI: https://doi.org/10.1007/978-94-011-4094-2_12
Publisher Name: Springer, Dordrecht
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