Abstract
Nanostructured films are widely used in optics, microelectronics, laser engineering and many other fields of science and technology [1]. The materials must possess certain properties, for instance, mechanical or electrophysical depending on the application. The properties, as a rule, are determined by the composition of the growing films and also by the size of the crystalline grains forming the films [2]. Both systems can be studied in a similar way. Film systems are examined here only as an example since now they are widely used.
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Kukushkin, S.A., Osipov, A.V. (2000). Evolution of Phase Composition and Associated Properties in the Process of Growth of Nanostructured Films. In: Chow, GM., Ovid’ko, I.A., Tsakalakos, T. (eds) Nanostructured Films and Coatings. NATO Science Series, vol 78. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-4052-2_23
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DOI: https://doi.org/10.1007/978-94-011-4052-2_23
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