Abstract
Conductivity of potassium implanted amorphous silicon thin films is studied as a function of implanted dose and thickness of the implanted layer. A maximum room temperature conductivity of 1 (Ω·cm)-1 is found. This value is the highest ever reported in doped hydrogenated amorphous silicon. The corresponding conductivity activation energy is 0.05 eV. These values are obtained by quenching the material from 200°C to room temperature. No cooling rate dependence is found after hydrogenation by a Kaufmann ion source, showing a hydrogen related stabilization. In p-i-n cells, such a highly conductive n +-layer has the potential to improve the cell open circuit voltage (V oc ) through an increase of the built-in potential.
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© 1991 Springer Science+Business Media Dordrecht
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Rizzoli, R., Summonte, C., Galloni, R., Zignani, F., Larsen, A.N. (1991). Potassium Ion Implantation Doping of the n-Layer for p-i-n Amorphous Silicon Solar Cells. In: Luque, A., Sala, G., Palz, W., Dos Santos, G., Helm, P. (eds) Tenth E.C. Photovoltaic Solar Energy Conference. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-3622-8_274
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DOI: https://doi.org/10.1007/978-94-011-3622-8_274
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