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Semiconductor device manufacture

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Manufacturing Technology in the Electronics Industry

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Abstract

Semiconductor devices, and in particular integrated circuits, are the basic building blocks of modern electronic circuits.

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Further Reading

  • Ruska, W.S. (1987) Microelectronic Processing, McGraw-Hill, New York.

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Author information

Authors and Affiliations

  1. British Rail Research, Derby, UK

    Phillip R. Edwards (Principal Scientific Officer)

Authors
  1. Phillip R. Edwards
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© 1991 Phillip R. Edwards

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Edwards, P.R. (1991). Semiconductor device manufacture. In: Manufacturing Technology in the Electronics Industry. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-3130-8_4

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  • DOI: https://doi.org/10.1007/978-94-011-3130-8_4

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-0-412-37130-1

  • Online ISBN: 978-94-011-3130-8

  • eBook Packages: Springer Book Archive

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