Laser interferometry for precision engineering metrology

Abstract

Interferometric techniques for the precision measurement of length have found increasing application since the turn of the century. With the advent of compact laser systems of narrow spectral bandwidth and corresponding high coherence, laser interferometry has developed into a standard technique for the measurement of length, displacement, angle and other related dimensional quantities at the highest precision. A number of manufacturers within the high-technology optical industries provide complete stand-alone or OEM length and displacement measuring systems. Most precision engineering concerns now take advantage of the high resolution and accuracy of these devices, both in the calibration of material standards such as gauge blocks and line standards, but also through on-line incorporation of such devices into computer-controlled lathes and three-axis co-ordinate measurement machines.