Abstract
As can be seen from the flow diagram of the case study, a variety of materials are used in the fabrication of semiconductors, including silicon wafers, chemicals, gases and water. These raw materials are produced mostly by the chemical industry. This chapter considers the market for, and production of, these materials. A crucial factor in the operation is the control of the environment, particularly dust and waste from the process, both of which will have a direct effect on the yield of the final products. Unreacted chemicals and gases from the process cause pollution if they are not treated properly and so it is necessary to consider how they need to be handled to avoid such problems.
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© 1993 Springer Science+Business Media Dordrecht
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The Society of Chemical Engineers of Japan. (1993). Production of silicon wafers and environmental problems. In: Introduction to VLSI Process Engineering. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1562-9_7
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DOI: https://doi.org/10.1007/978-94-011-1562-9_7
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4682-4
Online ISBN: 978-94-011-1562-9
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