Abstract
Crystallization of amorphous thin films of germanium obtained by physical vapour deposition was achieved during deposition by appropriate heating of the substrate or after deposition by annealing at elevated temperatures. The temperature at which the crystallization starts can be markedly lowered and the crystallinity of the films obtained can be substantially increased by capping the crystalline substrates with amorphous carbon layers. A combination of substrate capping and post-deposition annealing leads to almost completely crystalline films that exhibit a heavily twinned structure. The role of twinning in the structural evolution of the crystalline fabric is studied by high resolution electron microscopy (HREM).
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© 1994 Springer Science+Business Media Dordrecht
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Hofmeister, H. (1994). The Structural Evolution of Nanocrystalline Thin Films of Germanium. In: Hadjipanayis, G.C., Siegel, R.W. (eds) Nanophase Materials. NATO ASI Series, vol 260. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1076-1_26
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DOI: https://doi.org/10.1007/978-94-011-1076-1_26
Publisher Name: Springer, Dordrecht
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