Abstract
Amorphous carbon layers with high optical gap have been investigated within UV-visible light range by optical transmission and spectroellipsometry methods. Samples were obtained by RF magnetron sputtering of carbon target, or by glow discharge decomposition of methane. A fit of spectral dependence of optical constants to the transmission and ellipsometric measurements is given. The experimental results on optical constants are used in order to evaluate by EMA procedure the diamond, graphitic, polymeric and voids composition of a-C:H films. A large fraction of voids was found within all high optical gap sputtering layers. By addition of up to 5%H to the sputtering atmosphere, the optical gap increases and graphitic component decreases. Above 5%H, the optical gap decreases and a significant polymeric component was observed. By glow discharge technique at low temperature, a-C:H films of a dominant polymeric type are obtained.
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© 1995 Springer Science+Business Media Dordrecht
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Stoica, T., Dragomir, A., Gartner, M., Morosanu, C., Pavelescu, G. (1995). Optical Properties of Sputtering and Glow Discharge a-C:H Films. In: Prelas, M.A., Gielisse, P., Popovici, G., Spitsyn, B.V., Stacy, T. (eds) Wide Band Gap Electronic Materials. NATO ASI Series, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0173-8_29
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DOI: https://doi.org/10.1007/978-94-011-0173-8_29
Publisher Name: Springer, Dordrecht
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