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Doping of Diamond-Like Carbon Films

  • Chapter
Wide Band Gap Electronic Materials

Part of the book series: NATO ASI Series ((ASHT,volume 1))

Abstract

In this paper electrical properties of heterojunction silicon-Al doped DLC were analysed. The Al doped DLC films (DLC:Al) were obtained by the RF decomposition of methane with in situ magnetron sputtering of doping materials. The obtained p-n junction characteristics and TEM observations indicated that aluminium could be introduced into DLC. An inexpensive new method for manufacturing doped-DLC materials on a very large surface is offered. One should underline that this doping method dispenses with the use of poisonous substances.

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Author information

Authors and Affiliations

  1. Institute of Materials Science and Engineering, Technical University of Łódź, ul. Stefanowskiego 1, 90-924, Lodz, Poland

    Stanisław Mitura

  2. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, ul. Koszykowa 75, 00-662, Warsaw, Poland

    Jan Szmidt

  3. Institute of Materials Science and Engineering, Warsaw University of Technology, ul. Narbutta 85, 02-524, Warsaw, Poland

    Aleksandra Sokołowska

Authors
  1. Stanisław Mitura
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  2. Jan Szmidt
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  3. Aleksandra Sokołowska
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Editor information

Editors and Affiliations

  1. University of Missouri-Columbia, Columbia, Missouri, USA

    Mark A. Prelas  & Tina Stacy  & 

  2. Florida A&M University/Florida State University, Tallahassee, Florida, USA

    Peter Gielisse

  3. Rockford Diamond Technology, Inc., Columbia, Missouri, USA

    Galina Popovici

  4. Russian Academy of Sciences, Moscow, Russia

    Boris V. Spitsyn

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© 1995 Springer Science+Business Media Dordrecht

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Mitura, S., Szmidt, J., Sokołowska, A. (1995). Doping of Diamond-Like Carbon Films. In: Prelas, M.A., Gielisse, P., Popovici, G., Spitsyn, B.V., Stacy, T. (eds) Wide Band Gap Electronic Materials. NATO ASI Series, vol 1. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0173-8_23

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  • DOI: https://doi.org/10.1007/978-94-011-0173-8_23

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4078-5

  • Online ISBN: 978-94-011-0173-8

  • eBook Packages: Springer Book Archive

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