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Concept of a Miniaturised System for Multicomponent Gas Analysis Based on Non-Dispersive Infrared Techniques

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Micro Total Analysis Systems

Abstract

The set up of a miniaturised multicompound gas analysis system based on the infrared absorption photometry is proposed. It seems to be a promising concept to apply the principles of the non dispersive infrared (NDIR) technique in a miniaturised analysis system using silicon based technologies. The fabrication of the optical components by silicon micromachinig technologies is discussed as well as different technological alternatives of the NDIR techniques.

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References

  1. C. H. Mastrangelo, J. H. J. Yeh, and R. S. Muller, Electrical and optical characteristics of vacuumsealed polysilicon micro lamps, IEEE Trans. Electron. Devices, 39 (1992) 1363–1374 .

    Article  CAS  Google Scholar 

  2. HITRAN database, molecular absorption parameters database.

    Google Scholar 

  3. K. Takeuchi,T. Tanaka,M. Ikeda,K. Shibata,Y. Sakauchi,Y. Yamada,and S. Nakano, Highly accurate gas sensor using a modulation-type pyroelectric infrared detector,Jpn. J. Appl. Phys.,32(1993)221–227

    Article  CAS  Google Scholar 

  4. J. de Frutos, J. M. Rodriguez, F. Lopez, A. J de Castro, J. Melendez and J. Meneses, Electrooptical infrared compact gas sensor, Sensors and Actuators B, 18–19 (1994) 682–686.

    Article  Google Scholar 

  5. Product information, IRIS infrared and inteligent sensors, pyroelectric four channel detector.

    Google Scholar 

  6. J. H. Jerman, D.J. Gift and S. R. Mallinson, A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support, Sensors and Actuators A, 29 (1991) 151–158.

    Article  Google Scholar 

  7. T. Chen, Wavelength-modulated optical gas sensor, Sensors and Actuators B, 13–14 (1993) 284–287.

    Article  Google Scholar 

  8. M. Zöchbauer, Fabry-Perot-Korrelationsphotometer fur die Gasanalyse, Technische Messen ,61–5 (1994) 195–203.

    Google Scholar 

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Author information

Authors and Affiliations

  1. Institute for Microsensors, -actuators and -systems (IMSAS), Dept. of Physics and El. Eng., University of Bremen, 28334, Bremen, Germany

    M. Gebhard & W. Benecke

Authors
  1. M. Gebhard
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  2. W. Benecke
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Editor information

Editors and Affiliations

  1. MESA Research Institute, University of Twente, The Netherlands

    A. Van den Berg  & P. Bergveld  & 

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© 1995 Springer Science+Business Media Dordrecht

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Gebhard, M., Benecke, W. (1995). Concept of a Miniaturised System for Multicomponent Gas Analysis Based on Non-Dispersive Infrared Techniques. In: Van den Berg, A., Bergveld, P. (eds) Micro Total Analysis Systems. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0161-5_36

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  • DOI: https://doi.org/10.1007/978-94-011-0161-5_36

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4072-3

  • Online ISBN: 978-94-011-0161-5

  • eBook Packages: Springer Book Archive

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