Abstract
Microanalysis systems which are built up in a modular way can be adapted to various applications by exchanging individual modules. Thus, a bigger number of units can be sold and prices reduced. At the Karlsruhe Nuclear Research Center a microfluidic handling module is being developed which will be used in two different microanalysis systems joined with sensor modules. A batch fabrication process has been developed which was used to manufacture micropumps and microvalve systems by assembly of two molded thermoplastic parts and transfer of a polyimide diaphragm from a silicon wafer.
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© 1995 Springer Science+Business Media Dordrecht
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Schomburg, W.K., Büstgens, B., Fahrenberg, J., Maas, D. (1995). Components for Microfluidic Handling Modules. In: Van den Berg, A., Bergveld, P. (eds) Micro Total Analysis Systems. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0161-5_31
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DOI: https://doi.org/10.1007/978-94-011-0161-5_31
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