Abstract
Owing to participation of Latvian and Swedish scientists in the field of chemically sensitive FET and MOS structures it was possible to utilize the technological facilities of the Microelectronics enterprise in Latvia in making an integrated smart sensor as a matrix of chemically sensitive FETs by using silicon based microtechnology. Thereby the first steps of µTAS in Latvia are made in the direction of integration of solid state ionic materials with FET and MOS structures to develop new chemically sensitive structures and systems.
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© 1995 Springer Science+Business Media Dordrecht
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Lúsis, A. et al. (1995). First Steps of µTAS in Latvia. In: Van den Berg, A., Bergveld, P. (eds) Micro Total Analysis Systems. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0161-5_27
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DOI: https://doi.org/10.1007/978-94-011-0161-5_27
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4072-3
Online ISBN: 978-94-011-0161-5
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