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Micro Total Analysis Systems pp 127–138Cite as

Micromachined Flow-Through Measurement Chambers Using LAPS Chemical Sensors

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Abstract

Micro Total Analysis Systems (µTAS) are envisioned as small analytical systems with incorporated sample handling. We discuss the concept of a system consisting of a microflow chamber in which a biological component is immobilized, and a chemical sensor which is part of the chamber. A particularly suitable sensor is the Light-Addressable Potentiometric Sensor (LAPS), due to its compatibility with micromachined surfaces and structures. Flow chambers are made by anisotropically etching channels in silicon, at the bottom of which one or more LAPS devices are defined. Eight separate flow channels are present on a 23 mm square chip. Data is presented on two types of biological components: enzymes and living cells.

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Authors and Affiliations

  1. Molecular Devices Corporation, 1311 Orleans Drive, Sunnyvale, CA, 94089, USA

    Luc Bousse & Richard McReynolds

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  1. Luc Bousse
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  2. Richard McReynolds
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Editors and Affiliations

  1. MESA Research Institute, University of Twente, The Netherlands

    A. Van den Berg  & P. Bergveld  & 

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© 1995 Springer Science+Business Media Dordrecht

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Bousse, L., McReynolds, R. (1995). Micromachined Flow-Through Measurement Chambers Using LAPS Chemical Sensors. In: Van den Berg, A., Bergveld, P. (eds) Micro Total Analysis Systems. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0161-5_12

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  • DOI: https://doi.org/10.1007/978-94-011-0161-5_12

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-4072-3

  • Online ISBN: 978-94-011-0161-5

  • eBook Packages: Springer Book Archive

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