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Polyimides pp 227-251 | Cite as

Polyimides for semiconductor applications

  • H. Satou
  • H. Suzuki
  • D. Makino

Abstract

A wide variety of polymeric materials are used in the manufacture of semiconductor devices. Examples include polymers for use as photoresists in microfabrication and epoxy moulding compounds used in electronic packaging.

Keywords

Passivation Film Breakdown Voltage Sodium Lauryl Sulfate Polyimide Film Polyamic Acid 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • H. Satou
  • H. Suzuki
  • D. Makino

There are no affiliations available

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