Abstract
A wide variety of polymeric materials are used in the manufacture of semiconductor devices. Examples include polymers for use as photoresists in microfabrication and epoxy moulding compounds used in electronic packaging.
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Satou, H., Suzuki, H., Makino, D. (1990). Polyimides for semiconductor applications. In: Wilson, D., Stenzenberger, H.D., Hergenrother, P.M. (eds) Polyimides. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-9661-4_8
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DOI: https://doi.org/10.1007/978-94-010-9661-4_8
Publisher Name: Springer, Dordrecht
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