Abstract
The first reported gas sensor based on a metal oxide semiconductor (MOS) device was the palladium gate MOSFET for the sensing of hydrogen described by Lundstrom (1) in 1975. Work since then has been based mainly on MOS devices having various transition-metal gate electrodes, primarily for the sensing of hydrogen-containing gases, although some work has been reported on the sensing of carbon monoxide with these devices. These sensors are based on standard microelectronic fabrication techniques and should therefore be easily mass produced at a relatively low unit cost.
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References
I. Lundstrom, S. Shivaraman, C. Svensson and L. Lundkvist, Appl. Phys. Lett. 26 (1975) 55–57.
S.M. Sze, Physics of Semiconductor Devices, 2nd edn., John Wiley, New York (1981).
I. Lundstrom, Sensors and Actuators 1 (1981) 403–426.
K.I. Lundstrom, M.S. Shivaraman and C.M. Svensson, J. Appl. Phys. 46 (1975) 3876–3881.
I. Lundstrom and D. Soderberg, Sensors and Actuators 5 (1981–2) 105–138.
M. Armgarth, D. Soderberg and I. Lundstrom, Appl. Phys. Lea. 41 (1982) 654–655.
T.L. Poteat, B. Lalevic, B. Kuliyev, M. Yousef and M. Chen, J. Electron. Mater. 12 (1983) 181–214.
C. Nylander, M. Armgarth and C. Svensson, J. Appl. Phys. 58 (1984) 1177–1188.
K. Dobos, M. Armgarth, G. Zimmer and I. Lundstrom, IEEE Trans. on Elect. Dey. ED 31 (4) (1984) 508–510.
L.-G. Petersson, H.M. Dannetun, J. Fogelberg and I. Lundstrom, J. Appl. Phys. 58 (1985) 404–413.
P.W. Atkins, Physical Chemistry, Oxford University Press, Oxford (1978) 946.
I. Robins, J.F. Ross and J.E.A. Shaw, J. Appl. Phys. 60 (1986) 843–845.
I. Lundstrom and T. Distefano, Solid State Comm. 19 (1976) 871–875.
F. Winquist, A. Spetz, M. Armgarth, C. Nylander and I. Lundstrom, Appl. Phys. Lett. 43 (1983) 839–841.
I. Lundstrom, M.S. Shivaraman and C. Svensson, Surf. Sci. 64 (1977) 497–519.
J. van Dijk, P.M. van der Velden, J.F. Ross, I. Robins and B.C. Webb, 6th Eur. Symp. on Corrosion Inhibitors, Ferrara (Sept. 1985).
I. Lundstrom, M.S. Shivaraman, L. Stiblert and C. Svensson, Rey. Sci. Instrum. 47 (1976) 738–740.
J.F. Ross, I. Robins and B.C. Webb, /st Conf. on Sensors and their Applications, Manchester (1983).
A. Spetz, F. Winquist, C. Nylander and I. Lundstrom, ACS Symp. Ser. 17: Proc. Int. Meeting Chem. Sens., Fukuoka, Japan, Elsevier, Amsterdam (1983) 479–487.
F. Winquist, A. Spetz, I. Lundstrom and B. Danielsson, Anal. Chim. Acta 164 (1984) 127–138.
A. Spetz, M. Armgarth and I. Lundstrom, VTT Symp. 45, 11th Nord. Semicond. meeting (1984) 233–236.
J.F. Ross, I. Robins and B.C. Webb, Sensors and Actuators 11 (1987) 73–90.
I. Lundstrom, M. Armgarth, A. Spetz and F. Winquist, Proc. Int. Meeting on Chem. Sensors, Bordeaux (1986) 387–390.
B. Danielsson, F. Winquist, K. Mosbach and I. Lundstrom, Biotech ‘83: Int. Conf. Appl. Biotech. (1983) 679–687.
F. Winquist, A. Spetz, M. Armgarth, I. Lundstrom and B. Danielsson, Sensors and Actuators 8 (1985) 91–100.
F. Winquist, A. Spetz, I. Lundstrom and B. Danielsson, Anal. Chim. Acta 163 (1984) 143–149.
J.F. Ross, C.I. Terry and B.C. Webb, J. Phys. E: Rev. Sci. Instrum. 19 (1986) 143–149.
M.S. Shivaraman, J. Appl. Phys. 47 (1976) 3592–3593.
W. Mokwa, G. Zimmer, K. Dobos, D. Kohl and G. Heiland, 2nd Conf. on Sensors and their Applications, Southampton (1985).
U. Ackelid, M. Armgarth, A. Spetz and I. Lundstrom, IEEE Electron. Dev. Lett. EDL-7 (6) (1986) 353–355.
U. Ackelid, F. Winquist and I. Lundstrom, Proc. 2nd Int. Meeting on Chem. Sensors, Bordeaux, (1986) 395–398.
K. Dobos, B. Hofflinger and G. Zimmer, Vide Couches Minches 201 (1980) 743–745.
D. Krey, K. Dobos and G. Zimmer, Sensors and Actuators 3 (1982/3) 169–177.
K. Dobos, D. Krey and G. Zimmer, Proc. Int. Meeting on Chem. Sensors, Fukuoka, Japan, Elsevier, Amsterdam, (1983) 464–467.
K. Dobos and G. Zimmer, IEEE Trans. on Electron. Dey. ED-32 (7) (1985) 1165–1169.
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Robins, I. (1988). MOSFET devices. In: Edmonds, T.E. (eds) Chemical Sensors. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-9154-1_10
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DOI: https://doi.org/10.1007/978-94-010-9154-1_10
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