Abstract
This article reviews the fabrication, characterisation methods and applications of rare earth transition metal films with giant magnetostrictive and soft magnetic properties. Optimised materials could be the base for various microactuators such as microfluidic devices, micromotors, micromirrors or -sensors e.g. for detecting mechanical stresses or magnetic fields. One of the key advantages of magnetostrictive microactuators is seen in the possibility of a remote operation. Examples of possible materials are amorphous Tb40Fe60 and Sm40Fe60 films and (Tb40Fe60 / Co50Fe50) multilayer films, having amorphous TbFe layers and crystalline FeCo layers. The most common deposition method is magnetron sputtering, the influences of the deposition parameters on the film quality will be addressed. Special post deposition treatments like magnetic field annealing are discussed with respect to an achievement of a well defined magnetic anisotropy. The magnetostrictive characterisation of the films is performed using an optical beam deflection method. This method derives the magnetoelastic coupling coefficient which is independent of the Young’s modulus of the film. The dependencies of the magnetic and magnetostrictive properties on the multilayer compositions will be explained as well as the temperature dependencies of the magnetostriction of these materials. Optimised (7 nm Tb40Fe60 / 9 nm Co50Fe50) multilayer films show a magnetoelastic coupling coefficient of 27 MPa at an external magnetic field of 20 mT and a coercive field of about 2 mT. Further effects like magnetoresistance and the ΔE-effect are investigated and the correlation to the magnetostrictive effect are presented. The results of the materials development are discussed in view of possible applications which are mainly in the area of microelectromechanical systems (MEMS).
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Quandt, E. (1997), Journal of Alloys and Compounds 258, 126.
Duc, N.H., K. Mackay, J. Betz, D. Givord (1996), J. Appl Phys. 79, 973.
Schatz, F., M. Hirscher, M. Schnell, G. Flik, H. Kronmüller (1994) J. Appl Phys. 76, 5380.
Lim, S.H., Choi, Y.S., Han, S.H., Kim, HJ., Shima, T., Fujimori, H. (1998), Journal of Magnetism and Magnetic Materials 189, 1.
Quandt, E., Ludwig, A., Betz, J., Mackay, K., Givord, D. (1997) J. Appl Phys. 81 (8), 5420.
Quandt, E., Ludwig, A. (1999), J Appl Phys. 85(8), 6232.
Trémolet de Lacheisserie, E. du, Peuzin, J.C. (1994), J. Magn. Magn. Mater. 136, 189.
Speliotis, A., Kalogirou, O., Niarchos, D. (1997): Magnetostrictive properties of amorphous and partially crystalline TbDyFe thin films, J. Appl Phys. 81(8), 5696–5698.
Quandt, E., Gerlach, B., Seemann, K. (1994): Preparation and applications of magnetostrictive thin films, J. Appl. Phys. 76(10), 7000–7002.
Ludwig, A., Quandt, E. (2000), Giant magnetostrictive thin films for applications in microelectromechanical systems J. Appl. Phys. 87(9), 4691–4695.
Chopra, H.D., Ludwig, A., Quandt, E., Hua, S.Z., Brown, H.J., Swartzendruber, L.J., Wuttig, M. (1999), Magnetic Mesostructure of Giant Magnetostrictive Spring Magnet Type Multilayers, J. Appl. Phys. 85(8), 6238–6240.
Quandt, E. (1994), J. Appl. Phys. 75, 5653.
Honda, Hayashi, Yamaguchi, Arai (1994), IEEE Transl. J. Magn. Jpn. 9, 27.
Osiander, R., Ecelberger, S.A., Givens, A.B., Wickenden, D.K., Murphy, J.C. Kistenmacher, T.J. (1996), Appl Phys. Lett. 69(19), 2930.
Flik, G., Schnell, M., Schatz, F., Hirscher, M., Kronmüller, H. (1994), ACTUATOR 94, Conf. Proc., Axon GmbH, Bremen, 232.
Arai, K.I., Honda, T. (1996), Robotica, Vol. 14, 477.
Betz, J. (1997), Magnétostriction géante de couches minces et microactionneurs magnétostrictif pour des technologies intégrées, Ph.D. thesis, University Grenoble.
Orsier, E., Hiramoto, T., Betz, J., Mackay, K., Peuzin, J.C., Givord, D., Garnier, A. Mecatronics’ 96, Besancon, 537 (1996).
Quandt, E., Ludwig, A., Seemann, K. (1997), Transducers 97, 1089.
Claeyssen, F., Lhermet, N., Betz, J., MacKay, K., Givord, D., Quandt, E. Kronmüller, H. (1998), ACTUATOR 98, Conf. Proc, Messe Bremen GmbH, 372.
Berger, R., Krause, F., Dietzel, A., Seo, J.W. Fompeyrine, J., Locquet, J.-P. (2000), Nanoscale magnetostrictive response in a thin film owing to a local magnetic field, Appl. Phys. Lett. 76(5), 616–618.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Ludwig, A., Quandt, E. (2001). Rare Earth Transition Metal Thin Films and Devices. In: Gibbs, M.R.J. (eds) Modern Trends in Magnetostriction Study and Application. NATO Science Series, vol 5. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0959-1_3
Download citation
DOI: https://doi.org/10.1007/978-94-010-0959-1_3
Publisher Name: Springer, Dordrecht
Print ISBN: 978-0-7923-6717-8
Online ISBN: 978-94-010-0959-1
eBook Packages: Springer Book Archive