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Silicon Light Emitters: Preparation, Properties, Limitations, and Integration with Microelectronic Circuitry

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Part of the book series: NATO Science Series ((NAII,volume 6))

Abstract

Starting with Canham’s discovery in 1990 that porous silicon (PSi) can emit bright light in the visible range of the spectrum, there has been a strong interest in silicon light emitters. PSi and other light-emitting forms of silicon contain nanostructures or crystallites in the nanometer size range. Throughout most of the 1990’s, the intense visible luminescence from nanoscale silicon crystallites has been a source of numerous investigations and considerable debate. Today, most of the controversies have been put to rest. However, much less has been written about nanoscale Si light-emitting devices, in part because some of their characteristics are less than ideal and not well understood. This paper reviews the status of nanoscale silicon light emitters. It starts with a survey of the manufacturing methods used to produce nanoscale Si. Next, key physical, optical, electrical, and structural properties of nanoscale Si are examined. The fabrication of electroluminescent devices (LEDs) is then discussed. We focus on the stability, efficiency, speed, and spectral characteristics of nanoscale Si light emitters. Recent results obtained on microcavity PSi LEDs and 1.5μm LEDs produced by doping PSi with erbium are discussed. Finally, the integration of PSi LEDs with microelectronic circuitry is reported and the prospects for practical devices are briefly examined.

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References

  1. C.F. Klingshim, Semiconductor Optics (Springer, Berlin, 1995)

    Google Scholar 

  2. D.J. Lockwood, Light Emission in Silicon: From Physics to Devices, Semiconductors and Semimetals, Vol. 49 (Academic Press, San Diego, 1998)

    Google Scholar 

  3. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990)

    Article  ADS  Google Scholar 

  4. K.A. Littau, P.J. Szajowski, A.J. Miller, A.R. Kortan, and L.E. Brus, J. Phys. Chem. 97, 1224 (1993)

    Article  Google Scholar 

  5. P. M. Fauchet, L. Tsybeskov, C. Peng, S. P. Duttagupta, J. von Behren, Y. Kostoulas, J. V. Vandyshev, and K. D. Hirschman, IEEE Jour. Selected Topics in Quantum Electron. 1, 1126–1139 (1995)

    Article  Google Scholar 

  6. P.M. Fauchet, J. Luminesc. 70, 294 (1996)

    Article  ADS  Google Scholar 

  7. R.T. Collins, P.M. Fauchet, and M.A. Tischler, Physics Today 50, 24 (January 1997)

    Article  ADS  Google Scholar 

  8. A.G. Cullis, L.T. Canham, and P.D.J. Calcott, J. Appl. Phys. 82, 909 (1997)

    Article  ADS  Google Scholar 

  9. P. M. Fauchet, in Light Emission in Silicon: From Physics to Devices, D.J. Lockwood editor, Semiconductors and Semimetals, Vol. 49 (Academic Press, San Diego, 1998), pp 206–252

    Google Scholar 

  10. L.T. Canham, ed., Properties of Porous Silicon, Electronic Materials Information Service Datareviews Series No 18 (INSPEC, The Institution of Electrical Engineers, London, UK, 1997)

    Google Scholar 

  11. P.M. Fauchet, J. von Behren, K.D. Hirschman, L. Tsybeskov, and S.P. Duttagupta, Phys. Stat. Sol. (a) 165, 3(1998).

    Article  ADS  Google Scholar 

  12. A. Uhlir, Jr., Bell Syst. Tech. J. 35, 333 (1956)

    Google Scholar 

  13. R.L. Smith and S.D. Collins, J. Appl. Phys. 71, R1 (1992)

    Article  ADS  Google Scholar 

  14. P. M. Fauchet, in Pits and Pores: Formation, Properties, and Significance for Advanced Luminescent Materials, edited by P. Schmuki, D. J. Lockwood, H. Isaacs, and A. Bsiesy (The Electrochemical Society, Pennington, NJ, 1997), pp 27–60

    Google Scholar 

  15. P.M. Fauchet and J. von Behren, Phys. Stat. Sol. (b) 204, R7 (1997)

    Article  ADS  Google Scholar 

  16. L.T. Canham, A.G. Cullis, C. Pickering, O.D. Dosser, T.I. Cox, and T.P. Lynch, Nature 368, 133 (1994)

    Article  ADS  Google Scholar 

  17. J. von Behren, E.H. Chimowitz, and P.M. Fauchet, Adv. Mater. 9, 921 (1997)

    Article  Google Scholar 

  18. P.M. Fauchet, L. Tsybeskov, S.P. Duttagupta, and K.D. Hirschman, Thin Solid Films 297, 254 (1997)

    Article  ADS  Google Scholar 

  19. L. Canham, MRS Bulletin 18, 22 (July 1993)

    Google Scholar 

  20. L. Tsybeskov, S.P. Duttagupta, K.D. Hirschman, and P.M. Fauchet, in Advanced Luminescent Materials, D.J. Lockwood, P.M. Fauchet, N. Koshida, and S.R.J. Brueck, editors (The Electrochemical Society, Pennington, NJ, 1996), pp 34–47

    Google Scholar 

  21. L. Tsybeskov, S.P. Duttagupta, K.D. Hirschman, and P.M. Fauchet, Appl. Phys. Lett. 68, 2058 (1996)

    Article  ADS  Google Scholar 

  22. M. Warntjes, C. Vieillard, F. Ozanam, and J.N. Chazalviel, J. Electrochem. Soc. 142, 4138 (1995)

    Article  Google Scholar 

  23. J.M. Buriak and M.J. Allen, J. Am. Chem. Soc. 120, 1339 (1998)

    Article  Google Scholar 

  24. J. von Behren, T. van Buuren, M. Zacharias, E.H. Chimowitz, and P.M. Fauchet, Solid State Commun. 105, 317(1998)

    Article  ADS  Google Scholar 

  25. V. Lehmann and U. Gosele, Appl. Phys. Lett. 58, 856 (1991)

    Article  ADS  Google Scholar 

  26. P.D.J. Calcott, K.J. Nash, L.T. Canham, M.J. Kane, and D. Brumhead, J. Phys.: Condensed Matter 5, L91 (1993)

    Article  ADS  Google Scholar 

  27. J. von Behren, Y. Kostoulas, K. B. Ucer, and P. M. Fauchet, J. Non-Cryst. Solids 198-200, 957 (1996)

    Article  Google Scholar 

  28. L. Tsybeskov, K.L. Moore, D.G. Hall, and P.M. Fauchet, Phys. Rev. B 54, R8361 (1996)

    ADS  Google Scholar 

  29. C. Delerue, G. Allan, and M. Lannoo, Phys. Rev. B 48, 11024 (1993)

    ADS  Google Scholar 

  30. S. Prokes, Appl. Phys. Lett. 62, 3244 (1993)

    Article  ADS  Google Scholar 

  31. F. Koch, V. Petrova-Koch, and T. Muschik, J. Lumin. 57, 271 (1993)

    Article  Google Scholar 

  32. G. Allan, C. Delerue, and M. Lannoo, Phys. Rev. Lett. 76, 2961 (1996)

    Article  ADS  Google Scholar 

  33. H. Mizuno, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 3779 (1996)

    Article  ADS  Google Scholar 

  34. M. V. Wolkin, J. Jörne, P. M. Fauchet, G. Allan, and C. Delerue, Phys. Rev. Lett. 82, 197 (1999).

    Article  ADS  Google Scholar 

  35. L. Tsybeskov, S.P. Duttagupta, K.D. Hirschman, P.M. Fauchet, K.L. Moore, and D.G. Hall, Appl. Phys. Lett. 70, 1790(1997)

    Article  ADS  Google Scholar 

  36. L. Tsybeskov, Ju.V. Vandyshev, and P.M. Fauchet, Phys. Rev. B 49, 7821 (1994)

    Article  ADS  Google Scholar 

  37. R.E. Hummel, A. Morrone, M. Ludwig, and S.S. Chang, Appl. Phys. Lett. 63, 271 (1993)

    Article  Google Scholar 

  38. A.G. Nassiopoulos, S. Grigoropoulos, D. Papadimitriou, and E. Gogolides, Phys. Stst, Sol. (b) 190, 91 (1995)

    Article  ADS  Google Scholar 

  39. S.H. Zaidi, A.-S. Chu, and S.R.J. Brueck, Mat. Res. Soc. Symp. Proc. 358, 957 (1995)

    Article  Google Scholar 

  40. H. Tamura, M. Ruckschloss, T. Wirschem, and S. Veprek, Appl. Phys. Lett. 65, 1537 (1994)

    Article  ADS  Google Scholar 

  41. V. Petrova-Koch, T. Fischer, K. Sheglov, and F. Koch, in Advanced Luminescent Materials, D.J. Lockwood, P.M. Fauchet, N. Koshida, and S.R.J. Brueck, editors (The Electrochemical Society, Pennington, NJ, 1996), pp 382–392

    Google Scholar 

  42. L. Tsybeskov, K.D. Hirschman, S.P. Duttagupta, P.M. Fauchet, M. Zacharias, P. Kohlert, J.P. McCaffrey, and D.J. Lockwood, in Quantum Confinement: Nanoscale Materials, Devices, and Systems, edited by M. Cahay, J.P. Leburton, D.J. Lockwood, and S. Bandyopadhyay (The Electrochemical Society, Pennington, NJ, 1997), pp 134–145

    Google Scholar 

  43. L. Tsybeskov, K.D. Hirschman, S.P. Duttagupta, M. Zacharias, P.M. Fauchet, J. McCaffrey, and D.J. Lockwood, Appl. Phys. Lett. 72, 43 (1998)

    Article  ADS  Google Scholar 

  44. L. Tsybeskov, K. D. Hirschman, S. P. Duttagupta, P. M. Fauchet, M. Zacharias, J. P. McCaffrey, and D. J. Lockwood, Phys. Stat. Sol. (a) 165, 69 (1998)

    Article  ADS  Google Scholar 

  45. A. Halimaoui, C. Oules, G. Bomchil, A. Bsiesy, F. Gaspard, R. Herino, M. Ligeon, and F. Muller, Appl. Phys. Lett. 59, 304(1991)

    Article  ADS  Google Scholar 

  46. A. Richter, P. Steiner, F. Kozlowski, and W. Lang, IEEE Electron Device Lett. 12, 691 (1991)

    Article  ADS  Google Scholar 

  47. N.M. Kalkhoran, F. Namavar, and H.P. Maruska, Mat. Res. Soc. Symp. Proc. 256, 84 (1992)

    Google Scholar 

  48. E. Bassous, M. Freeman, J.-M. Halbout, S.S. Iyer, V.P. Kesan, P. Munguia, S.F. Pesarcik, and B.L. Williams, Mat. Res. Soc. Symp. Proc. 256, 23 (1992)

    Article  Google Scholar 

  49. N. Koshida and H. Koyama, Appl, Phys. Lett. 60, 347 (1992)

    Article  ADS  Google Scholar 

  50. A. Bsiesy, F. Muller, M. Ligeon, F. Gaspard, R. Herino, R. Romestain, and J.-C. Vial, Phys. Rev. Lett. 71, 637(1993)

    Article  ADS  Google Scholar 

  51. N. Koshida, H. Koyama, Y. Yamamoto, and G.J. Collins, Appl. Phys. Lett. 63, 2655 (1993)

    Article  ADS  Google Scholar 

  52. C. Peng, K.D. Hirschman, and P.M. Fauchet, J. Appl. Phys. 80, 295 (1996)

    Article  ADS  Google Scholar 

  53. M. Ben-Chorin, in Properties of Porous Silicon, Electronic Materials Information Service Datareviews Series No 18 (INSPEC, The Institution of Electrical Engineers, London, UK, 1997), pp 165–175

    Google Scholar 

  54. A. Loni, A.J. Simons, T.I. Cox, P.D.J. Calcott, and L.T. Canham, Electron. Lett, 31, 1288 (1995)

    Article  Google Scholar 

  55. L. Tsybeskov, S.P. Duttagupta, K.D. Hirschman, and P.M. Fauchet, in Advanced Luminescent Materials, edited by D.J. Lockwood, P.M. Fauchet, N. Koshida, and S.R.J. Brueck (The Electrochemical Society, Pennington, NJ, 1996), pp 34–47

    Google Scholar 

  56. L. Tsybeskov, S.P. Duttagupta, K.D, Hirschman, and P.M. Fauchet, Appl. Phys. Lett. 68, 2058 (1996)

    Article  ADS  Google Scholar 

  57. J. Linnros and N. Lalic, Appl. Phys. Lett. 66, 3048 (1995)

    Article  ADS  Google Scholar 

  58. A.J. Simons, T.I. Cox, A. Loni, L.T. Canham, M.J. Uren, C. Reeves, A.G. Cullis, P.D.J. Calcott, M.R. Houghton, and J.P. Newey, in Advanced Luminescent Materials, edited by D.J. Lockwood, P.M. Fauchet, N. Koshida, and S.R.J. Brueck (The Electrochemical Society, Pennington, NJ, 1996), pp 73–86.

    Google Scholar 

  59. B. Gelloz, T. Nakagawa, and N. Koshida, Appl. Phys. Lett. 73, 2021 (1998)

    Article  ADS  Google Scholar 

  60. C. Peng and P.M. Fauchet, Appl. Phys. Lett. 67, 2515 (1995)

    Article  ADS  Google Scholar 

  61. S. Lazarouk, P. Jaguiro, S. Katsouba, G. Masini, S. La Monica, G. Maiello, and A, Ferrari, Appl. Phys. Lett. 68, 1646(1996)

    Article  ADS  Google Scholar 

  62. J. Wang, F.-L. Zhang, W.-C. Wang, J.-B. Zheng, X.-Y. Hou, and X. Wang, J. Appl. Phys. 75, 1070 (1994)

    Article  ADS  Google Scholar 

  63. P. Steiner, F. Kozlowski, H. Sandmaier, and W. Lang, Mat. Res. Soc. Symp, Proc. 283, 343 (1993)

    Article  Google Scholar 

  64. L. Tsybeskov, K.L. Moore, S.P. Duttagupta, K.D. Hirschman, D.G. Hall, and P.M. Fauchet, Appl. Phys. Lett. 69, 3411 (1996)

    Article  ADS  Google Scholar 

  65. M. G. Berger, M. Thönissen, R. Arens-Fischer, H. Münder, H. Lüth, M. Arntzen, and W. Theiß, Thin Solid Films 255, 313(1995)

    Article  ADS  Google Scholar 

  66. M. G. Berger, C. Dieker, M. Thönissen, L. Vescan, H. Liith, H. Münder, M. Wernke, and P. Grosse, J. Phys. D: Appl. Phys. 27, 1333 (1994)

    Article  ADS  Google Scholar 

  67. S. Frohnhoff and M. G. Berger, Adv. Mater. 6, 963 (1994)

    Article  Google Scholar 

  68. L. Pavesi, La Rivista del Nuovo Cimento 20, 1 (1997)

    Article  Google Scholar 

  69. W. Theiβ, Surface Science Reports 29, 91 (1997)

    Article  ADS  Google Scholar 

  70. S. Chan, L. Tsybeskov, and P. M. Fauchet, Mat. Res. Soc. Symp. Proc. 536, 117 (1999)

    Article  Google Scholar 

  71. C. Peng and P. M. Fauchet, Appl. Phys. Lett. 67, 2515 (1995)

    Article  ADS  Google Scholar 

  72. S. Chan and P. M. Fauchet, in Silicon-based Optoelectronics, edited by D. C. Houghton and E. A. Fitzgerald, SPIE Proc. 3630, 144 (1999)

    Google Scholar 

  73. M. Araki, H. Koyama, and N. Koshida, Appl. Phys. Lett. 69, 2956 (1996)

    Article  ADS  Google Scholar 

  74. L. Pavesi, C. Mazzoleni, A. Tredicucci, and V. Pellegrini, Appl. Phys. Lett. 67, 3280 (1995)

    Article  ADS  Google Scholar 

  75. A. Tredicucci, Y. Chen, V. Pellegrini, and C. Departs, Appl. Phys. Lett. 66, 2388 (1995)

    Article  ADS  Google Scholar 

  76. H. Ennen, J. Schneider, G. Pomrenke, and A. Axmann, Appl. Phys. Lett. 43, 943 (1983)

    Article  ADS  Google Scholar 

  77. S. Coffa, F. Priolo, G. Franzo, V. Bellani, A. Camera, and C. Spinella, Phys. Rev. B 48, 11782 (1993)

    Article  ADS  Google Scholar 

  78. H. Ennen, U. Kaufmann, G. Pomrenke, J. Schneider, J. Windscheif, and A. Axmann, J. Cryst. Growth 64, 165(1983)

    Article  ADS  Google Scholar 

  79. A. Polman, J. Appl. Phys. 82, 1 (1997)

    Article  ADS  Google Scholar 

  80. F. Namavar, F. Lu, C. H. Perry, A. Cremins, N. M. Kalkhoran, J. T. Daly, and R. A. Soref, Mat. Res. Soc. Symp. Proc. 358, 375 (1995)

    Article  Google Scholar 

  81. A. M. Dorofeev, N. V. Gaponenko, V. P. Bondarenko, E. E. Bachilo, N. M. Kazuchits, A. A. Leshok, G. N. Tryanova, N. N. Vorosov, V. E. Borisenko, H. Gnaser, W. Bock, P. Becker, and H. Oechsner, J. Appl. Phys. 77, 2679 (1995)

    Article  ADS  Google Scholar 

  82. H. A. Lopez, X. L. Chen, S. A. Jenekhe, and P. M. Fauchet, J. Lumin. 80, 115 (1999)

    Article  Google Scholar 

  83. T. Kimura, A. Yokoi, H. Horiguchi, R. Saito, T. Ikoma, and A. Sato, Appl. Phys. Lett. 65, 983 (1994)

    Article  ADS  Google Scholar 

  84. H. A. Lopez, S. Chan, L. Tsybeskov, H. Koyama, V. P. Bondarenko, and P. M. Fauchet, Mat. Res. Soc. Symp. Proc. 536, 135 (1999)

    Google Scholar 

  85. L. Tsybeskov, S. P. Duttagupta, K. D. Hirschman, P. M. Fauchet, K. L. Moore, and D. G. Hall, Appl. Phys. Lett. 70, 1790 (1997)

    Article  ADS  Google Scholar 

  86. H. A. Lopez and P. M. Fauchet, Appl. Phys. Lett. 75, 3989 (1999)

    Article  ADS  Google Scholar 

  87. S. Coffa, G. Franzo, and F. Priolo, MRS Bulletin 23(4), 25 (1998)

    Google Scholar 

  88. S. Coffa, G. Franzo, F. Priolo, A. Pacelli, and A. Lacaita, Appl. Phys. Lett. 73, 93 (1998)

    Article  ADS  Google Scholar 

  89. H. Isshiki, H. Kobayashi, S. Yugo, T. Kimura, and T. Ikoma, Appl. Phys. Lett. 58, 484 (1991)

    Article  ADS  Google Scholar 

  90. E. Ettedgui, C. Peng, L. Tsybeskov, Y. Gao, P.M. Fauchet, H.A. Mizes, and G.A. Carver, Mat. Res. Soc. Symp. Proc. 283, 173 (1993)

    Article  Google Scholar 

  91. S.P. Duttagupta, P.M. Fauchet, C. Peng, S.K. Kurinec, K. Hirschman, and T.N. Blanton, Mat. Res. Soc. Symp. Proc. 358, 647 (1995)

    Article  Google Scholar 

  92. S.P. Duttagupta, C. Peng, L. Tsybeskov, and P.M. Fauchet, Mat. Res. Soc. Symp. Proc. 380, 73 (1995)

    Article  Google Scholar 

  93. P. Schmuki, L.E. Erickson, and DJ. Lockwood, Phys. Rev. Lett. 80, 4060 (1998)

    Article  ADS  Google Scholar 

  94. K.D. Hirschman, L. Tsybeskov, S.P. Duttagupta, and P.M. Fauchet, Nature 384, 338 (1996)

    Article  ADS  Google Scholar 

  95. K. D. Hirschman, Ph.D. Thesis, University of Rochester, April 2000

    Google Scholar 

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Fauchet, P.M., Chan, S., Lopez, H.A., Hirschman, K.D. (2000). Silicon Light Emitters: Preparation, Properties, Limitations, and Integration with Microelectronic Circuitry. In: Pavesi, L., Buzaneva, E. (eds) Frontiers of Nano-Optoelectronic Systems. NATO Science Series, vol 6. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0890-7_7

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