Abstract
The fabrication of an integrated wavefront sensor implemented in standard microelectronics CMOS technology is presented. It is aimed at sensing the aberrations (distortions) present in a light beam. The device benefits from electronic functions integrability, straightforward concept and adequate speed for most Adaptive Optics applications. It consists of an array of 8x8 addressable quad-cells with an analog demultiplexor and sampling-rate controller and a custom Hartmann mask to sample the incident light.
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References
Malacara, D. (1991) Optical Shop Testing, 2nd edition, John Wiley & Sons Inc.
Tyson, R. (1997) Principles of Adaptive Optics, 2nd edition, Boston Academic Press.
Gaery, J.M. (1995) Introduction to Wavefront Sensors, SPIE Press.
Born, M. and Wolf, E. (1999) The Principles of Optics, 7th edition, Cambridge University Press.
Lima Monteiro, D.W. de, Vdovin, G. and Sarro, P.M. (1999) Various layouts of analog CMOS optical position-sensitive detectors, Proceedings of SPIE 3794, 134–142.
Lulé, T., Benthien, S. et al. (2000) Sensitivity of CMOS based imagers and scaling perspectives, IEEE Trans. Electron Devices 47(11), 2110–2122.
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© 2001 Springer Science+Business Media Dordrecht
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de Lima Monteiro, D.W., Vdovin, G. (2001). High Speed Integrated CMOS Wavefront Sensor. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_7
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DOI: https://doi.org/10.1007/978-94-010-0840-2_7
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3841-6
Online ISBN: 978-94-010-0840-2
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