Abstract
Spatial light modulators are used for spatial modulation of optical wavefronts in terms of intensity, phase and polarization. These devices are typically used for projection displays, information processing systems, communication networks, optical lithography, etc.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J.A. van Raalte (1970) A new Schlieren light valve for television projection, Applied Optics 9.
L.J. Hornbeck (1990) Deformable-mirror spatial light modulators, Proc. SPIE Vol. 1150, p. 86–102
W.R. Wu, et al (1988) Electro optical performance of an improved deformable mirror device, Bellingham, WA, Society of Photo-Optical Instrumentation Engineers, p. 24–31.
H. Kück, et al (1996), Deformable micromirror devices as phase-modulating high-resolution light valves, Sensors and Actuators A 54, p. 536–541.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Sakarya, S., Vdovin, G., Sarro, P.M. (2001). Technology for Spatial Light Modulators Based on Reflective Silicon Structures. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_5
Download citation
DOI: https://doi.org/10.1007/978-94-010-0840-2_5
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3841-6
Online ISBN: 978-94-010-0840-2
eBook Packages: Springer Book Archive