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Technology for Spatial Light Modulators Based on Reflective Silicon Structures

  • S. Sakarya
  • G. Vdovin
  • P. M. Sarro
Conference paper

Abstract

Spatial light modulators are used for spatial modulation of optical wavefronts in terms of intensity, phase and polarization. These devices are typically used for projection displays, information processing systems, communication networks, optical lithography, etc.

Keywords

Electrode Array Curvature Modulation Spatial Light Modulator Space Distance Bulk Silicon 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    J.A. van Raalte (1970) A new Schlieren light valve for television projection, Applied Optics 9.Google Scholar
  2. 2.
    L.J. Hornbeck (1990) Deformable-mirror spatial light modulators, Proc. SPIE Vol. 1150, p. 86–102CrossRefGoogle Scholar
  3. 3.
    W.R. Wu, et al (1988) Electro optical performance of an improved deformable mirror device, Bellingham, WA, Society of Photo-Optical Instrumentation Engineers, p. 24–31.Google Scholar
  4. 4.
    H. Kück, et al (1996), Deformable micromirror devices as phase-modulating high-resolution light valves, Sensors and Actuators A 54, p. 536–541.Google Scholar

Copyright information

© Springer Science+Business Media Dordrecht 2001

Authors and Affiliations

  • S. Sakarya
    • 1
  • G. Vdovin
    • 1
  • P. M. Sarro
    • 1
  1. 1.Laboratory of Electronic InstrumentationDelft University of TechnologyDelft

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