Abstract
A thermal flow sensor is designed and realized. The sensor is built according to the Thermal Balance Anemometer concept and consists of a co-design of a oscillating differential power controller and the physical sensor structure. With relative simple electronics a flow-dependent-duty-cycle square wave output signal is generated which is directly readable by modern digital signal processors.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
B.W. van Oudheusden, “Silicon thermal flow sensors”, Sensors and Actuators, A30 (1992), pp. 5–26.
R.G. Johnson and R.E. Higashi, “A Highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications”, Sensors and Actuators, 11 (1987), pp. 63–72.
R.G. Johnson and R.E. Higashi, “Semiconductor device”, US patent nr: 4651564.
T.S.J. Lammerink, N.R. Tas, M. Elwenspoek and J.H.J. Fluitman, “Micro liquid flow sensor”, Sensors and Actuators, 37–38 (1993), pp. 45–50.
H.E. De Bree, H.V. Jansen, T.S.J. Lammerink, G.J.M. Krijnen and M. Elwenspoek, “Bidirectional fast flow sensor with large dynamic range”, Proc. MME’ 98, Ulvic (Norway) June 3–5, 1998, pp. 194–197.
B.W. van Oudheusden, “The thermal modeling of a flow sensor based on differential convective heat transfer”, Sensors and Actuators, A29 (1991), pp. 93–106
T.S.J. Lammerink, N.R. Tas, G.J.M. Krijnen and M. Elwenspoek, “A New Class of Thermal Flow Sensors Using ΔT=0 as Control Signal”, Proceedings of the MEMS 2000 conference 23–27 January 2000, Miyazaki, Japan, pp. 525–530.
T.S.J. Lammerink, N.R. Tas, A.J. van der Wiel, G.J.M. Krijnen and M. Elwenspoek, “ A New Class of Temperature-Balance Flow Sensors”, to be published.
T.S.J. Lammerink, N.R. Tas, J.W. van Honschoten, G.J.M. Krijnen, J.J. van Baar and M.C. Elwenspoek, “AC-Driven Temperature-Balance Flow Sensor”, accepted for presentation at the Transducers 2001 conference in Munchen, Germany, June 2001.
Y. Pan, F.R. Riedijk and J.H. Huijsing, “A New Class of Integrated Thermal Oscillators with Duty-cycle Output for Application in Thermal Sensors”, Sensors and Actuators, A21–A23 (1990), pp. 655–659.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Lammerink, T.S.J., Wiegerink, R.J., Elwenspoek, M.C. (2001). Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_4
Download citation
DOI: https://doi.org/10.1007/978-94-010-0840-2_4
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3841-6
Online ISBN: 978-94-010-0840-2
eBook Packages: Springer Book Archive