Flow sensing using the temperature distribution along a heated microbeam

van Baar, J. J.; Wiegerink, R. J.; Krijnen, G. J. M.; Lammerink, T. S. J.; Elwenspoek, M. C.

doi:10.1007/978-94-010-0840-2_3

J. J. van Baar²,
R. J. Wiegerink²,
G. J. M. Krijnen²,
T. S. J. Lammerink² &
…
M. C. Elwenspoek²

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Abstract

The influence of the flow velocity profile on the temperature distribution along a heated segmented micro-machined beam has been studied. Two types of devices have been fabricated: a probe structure in a uniform flow and a beam crossing a channel with a parabolic flow profile. The beam contains a homogeneously heated heater with 25 platinum resistor segments for measuring the temperature distribution.

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J.J. van Baar, R.J. Wiegerink, G.J.M. Krijnen T.S.J. Lammerink, and M. Elwenspoek. Sensitive thermal flow sensor based on a micromachined two-dimensional resistor array. accepted for publication in Transducers 01.
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Authors and Affiliations

MESA Research Institute, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands
J. J. van Baar, R. J. Wiegerink, G. J. M. Krijnen, T. S. J. Lammerink & M. C. Elwenspoek

Authors

J. J. van Baar
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R. J. Wiegerink
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G. J. M. Krijnen
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T. S. J. Lammerink
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M. C. Elwenspoek
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MESA+ Research Institute, University of Twente, Enschede, The Netherlands
Miko Elwenspoek

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van Baar, J.J., Wiegerink, R.J., Krijnen, G.J.M., Lammerink, T.S.J., Elwenspoek, M.C. (2001). Flow sensing using the temperature distribution along a heated microbeam. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_3

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DOI: https://doi.org/10.1007/978-94-010-0840-2_3
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3841-6
Online ISBN: 978-94-010-0840-2
eBook Packages: Springer Book Archive

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