Abstract
Powder blasting is a fast and inexpensive directional etch technique for brittle materials like glass, silicon and ceramics. This new micromachining technique is currently extensively used for μ-fluidic devices [1][2]. However, unfamiliarity with this technique sometimes causes a hesitation to use it, especially due to the uncertainty about the effect of the rough surface on the device performance [3]. It is e.g. supposed that the roughness increases the electro-osmotic flow, fluidic mixing and hence the dispersion, although it has not been shown yet. Therefore it is important to be able to manipulate the roughness and study its effect on device performance. This paper shows how the roughness of a powder blasted surface can be controlled by process parameters, or changed with post treatments, both quantitatively and qualitatively.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Veenstra, T.T., Berenschot, J.W., Sanders, R.G.P., Gardeniers, J.G.E., Elwenspoek, M.C., Berg, A. van den, A Simple Selfpriming Bubble-Tolerant Peristaltic MicroPump, This conference: National Dutch Sensor Conference, Enschede, Netherlands (2001).
Schlautmann, S., Wensink, H., Schasfoort, R.B.M., Elwenspoek, M.C., & Berg, A. van den, Powder-blasting technology as a powerful tool for micro-fabrication of CE-chips with integrated conductivity sensors., Submitted to J. Micromech. Microeng.
Diepold, Th., Obermeier, E., Bulk micromachining of borosilicate glass by ultrasonic drilling and sand blasting, MicroSystem Techn.’ 96 (1996) 211–216
Slikkerveer, P.J., Bouten, P.C.P., Veld, F.H. in’ t, Scholten, H., Erosion and damage by sharp particles, Wear vol. 217 (1998) 237–250.
Finnie, I., Some reflections on the past and future of erosion, Wear vol. 186–187 (1995) 1–10.
Buijs, M., Pasmans, J.M.M., Erosion of glass by alumina particles: transitions and exponents, Wear, vol. 184 (1995) 61–65
Berthold, A., Low-temperature wafer-to-wafer bonding for microchemical systems, Ph.D. Thesis, Delft University of Technology, The Netherlands, (2001) 76–79.
Heller, P., Vervest, J., Wilbrink, H., Vademećum voor de glastechniek, Kluwer technische boeken B.V., Deventer, The Netherlands, (1992).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Wensink, H., Schlautmann, S., Goedbloed, M.H., El Wenspoek, M.C. (2001). Fine Tuning the Surface Roughness of Powder Blasted Glass Surfaces. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_18
Download citation
DOI: https://doi.org/10.1007/978-94-010-0840-2_18
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3841-6
Online ISBN: 978-94-010-0840-2
eBook Packages: Springer Book Archive