Abstract
A thorough understanding of friction mechanisms is needed for the successful development of future microelectromechanical systems (MEMS). Standard macro as well as advanced micro/nano friction experiments are reviewed, which address anisotropic friction characteristics of crystalline materials such as polycrystalline silicon (polysilicon) used for MEMS devices. Theoretical studies that predict these characteristics using the fundamentals of mechanics, thermodynamics, and associated molecular dynamics simulations are also reviewed. Results are discussed in light of our current understanding of fundamental friction mechanisms developed from both a macrotribological standpoint as well as a micro/nanotribological standpoint. The important roles of crystal orientation and grain boundaries in determining the magnitude of friction are considered.
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Weick, B.L., Bhushan, B. (2001). The Anisotropic Friction Characteristics of Crystalline Materials: A Review. In: Bhushan, B. (eds) Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales. NATO Science Series, vol 10. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0736-8_18
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DOI: https://doi.org/10.1007/978-94-010-0736-8_18
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