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A New Concept in Magnetic Force Microscope Cantilevers

  • A. G. Van Den Bos
  • A. C. J. Van Dijk
  • I. R. Heskamp
  • L. Abelmann
  • J. C. Lodder
Part of the NATO Science Series book series (NAII, volume 41)

Abstract

In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.

Keywords

Cantilever Beam Wafer Surface Magnetic Layer Magnetic Force Microscopy Magn Magn Mater 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media Dordrecht 2001

Authors and Affiliations

  • A. G. Van Den Bos
    • 1
  • A. C. J. Van Dijk
    • 1
  • I. R. Heskamp
    • 1
  • L. Abelmann
    • 1
  • J. C. Lodder
    • 1
  1. 1.Information Storage Technology Group, MESA Research InstituteUniversity of TwenteEnschedeThe Netherlands

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