An Approach to Smart Structure Design Using MEMS Technology

  • P. Minotti
Part of the NATO Science Series book series (NAII, volume 85)


The arrival of integrated circuits with very good performance/price ratios and relatively low-cost microprocessors and memories has had a profound influence on our way of life. In particular, electronic circuits were introduced on a large scale in the measurement and control field, leading to very sophisticated systems and opening new perspectives on active control of structures. However, most of current control systems involve sensors and actuators that were conceived a few decades ago. Accordingly, it becomes necessary to investigate new machining technologies that will allow sensors and actuators to be produced with performance/price ratios which would approach that of modern electronic circuits [1].


Microelectromechanical System Electrostatic Actuator Monolithic Integration Output Mechanical Power Driving Electrode 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media Dordrecht 2002

Authors and Affiliations

  • P. Minotti
    • 1
  1. 1.Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée R. ChaléatUniversité de Franche ComtéBesançon CedexFrance

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