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An Approach to Smart Structure Design Using MEMS Technology

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Responsive Systems for Active Vibration Control

Part of the book series: NATO Science Series ((NAII,volume 85))

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Abstract

The arrival of integrated circuits with very good performance/price ratios and relatively low-cost microprocessors and memories has had a profound influence on our way of life. In particular, electronic circuits were introduced on a large scale in the measurement and control field, leading to very sophisticated systems and opening new perspectives on active control of structures. However, most of current control systems involve sensors and actuators that were conceived a few decades ago. Accordingly, it becomes necessary to investigate new machining technologies that will allow sensors and actuators to be produced with performance/price ratios which would approach that of modern electronic circuits [1].

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Authors and Affiliations

  1. Institut des Microtechniques de Franche Comté, Laboratoire de Mécanique Appliquée R. Chaléat, Université de Franche Comté, 24 rue de l’Epitaphe, 25030, Besançon Cedex, France

    P. Minotti

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  1. P. Minotti
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  1. Université Libre de Bruxelles, Bruxelles, Belgium

    André Preumont

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Minotti, P. (2002). An Approach to Smart Structure Design Using MEMS Technology. In: Preumont, A. (eds) Responsive Systems for Active Vibration Control. NATO Science Series, vol 85. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0483-1_13

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  • DOI: https://doi.org/10.1007/978-94-010-0483-1_13

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-1-4020-0898-6

  • Online ISBN: 978-94-010-0483-1

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