Thin-Film Biotermosensors

Abstract

The thin films materials on the basis of nickel, yttrium, gadolinium, ytterbium, and cerium were evaporated and researched. Thin-film temperature-sensitive elements and heat flows sensors, manufactured according to microelectronic technology have linear metrological characteristics within wide temperature range of -150…+500°C, speed of response lesser than 1sec, positive temperature coefficient is 6,4-10^-3 I/degrees, dimensions are (1–1, 5) x(1–3)x0,5 mm. Strontium oxide entering in quantity of 5-20 % to CeO₂ composition lead to falling conductivity with minimum at 15 weight % of SrO and with following conductivity rise. For this composition it was obtained the maximum temperature resistance coefficient is TRC=8-10^-2 I/degree. Oxide cerium entering has also led to energy state altering of semiconductor surface and adsorption activity. The films of CeO₂ -10 % ZnO composition has the biggest temperature sensibility of 5.58-10^-2 I/degree.