Abstract
A novel micropump driven by traveling waves was developed using micromachine technology. The traveling waves were produced on the surface of the microchannel equipped with piezoelectric micro-array actuators. The micro-array actuators operated by sine wave with different phases successfully made the fluid in the microchannel flow smoothly in one direction. The flow direction and speed could be easily controlled by the driving voltage, frequency and phases. These excellent controllability of the micropump are suitable for the application of μ-TAS.
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References
R. Linnemann, P. Woias, C.-D. Senfft, and J. A. Ditterich, pp.532 – 537.
Ellis Meng, Xuan-Qi Wang, Howen Mak, and Yu-Chong Tai, MEMS ‘00, pp.62–67.
I. Kanno, S. Fujii, T. Kamada, and R. Takayama, Appl. Phys. Lett., 70(1997), pp.1378–1380.
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© 2002 Springer Science+Business Media Dordrecht
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Yakushiji, S., Kanno, I., Kotera, H. (2002). BI-Directional Valve-Less Micropump Using Piezoelectric Micro-Array Actuators. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_49
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DOI: https://doi.org/10.1007/978-94-010-0295-0_49
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3952-9
Online ISBN: 978-94-010-0295-0
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