Abstract
Process technologies for the fabrication of microfluidic devices with sub-micrometer scale fluidic channels and self-aligned electrodes have been studied. By employing these technologies, a prototype of the nanosorter device for the selective collection of sub-micrometer scale microparticles or cytoplasmic organelles has been fabricated.
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References
T. Ichiki, T. Ujiie, T. Hara, Y. Horiike and K. Yasuda, MicroTAS 2001, pp. 271–273 (2000).
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T. Ichiki, S. Takayanagi and Y. Horiike, J. Electrochem. Soc. 147, pp. 4289–4293 (2000).
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© 2002 Springer Science+Business Media Dordrecht
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Hara, T., Ichiki, T., Horiike, Y., Yasuda, K. (2002). Fabrication of on-Chip Sorter Devices with Sub-Micrometer Scale Channels and Self-Aligned Microelectrodes. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_41
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DOI: https://doi.org/10.1007/978-94-010-0295-0_41
Publisher Name: Springer, Dordrecht
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