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Fabrication of Microfluidic Channels with Symmetric Cross-Sections for Integrated NMR Analysis

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Micro Total Analysis Systems 2002

Abstract

We present a glass micromachining technology with improved alignment in order to process channels with symmetric cross-sections. Two well-defined marks deep-etched on glass are superimposed to align the wafers on a standard mask aligner. The best alignment resolution obtained to date was ± 5 μm.

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References

  1. J. D. Trumbull, I. K. Glasgow, D. J. Beebe, and R. L Magin, Integrating microfabricated fluidic systems and NMR spectroscopy, IEEE Transactions on Biomedical Engineering, Vol. 47, pp. 3–7, (2000).

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  2. C. Massin, A. Daridon, F. Vincent, G. Boero, P. -A. Besse, E. Verpoorte, N. F. de Rooij, and R. Popovic, A microfabricated probe with integrated coils and channels for on-chip NMR spectroscopy, in Micro Total Analysis Systems 2001, pp. 438–440.

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Author information

Authors and Affiliations

  1. SAMLAB, Institute of Microtechnology, University of Neuchâtel, Switzerland

    A. Homsy, J. Lichtenberg, N. F. de Rooij & E. Verpoorte

  2. Microsystems & Microtechnology Laboratory, STI-EPFL, Switzerland

    C. Massin, F. Vincent, P.-A. Besse & R. S. Popovic

Authors
  1. A. Homsy
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  2. J. Lichtenberg
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  3. C. Massin
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  4. F. Vincent
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  5. P.-A. Besse
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  6. R. S. Popovic
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  7. N. F. de Rooij
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  8. E. Verpoorte
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Editor information

Editors and Affiliations

  1. The University of Tokushima, Tokushima, Japan

    Yoshinobu Baba

  2. Waseda University, Tokyo, Japan

    Shuichi Shoji

  3. University of Twente, Enschede, The Netherlands

    Albert van den Berg

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© 2002 Springer Science+Business Media Dordrecht

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Cite this paper

Homsy, A. et al. (2002). Fabrication of Microfluidic Channels with Symmetric Cross-Sections for Integrated NMR Analysis. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_38

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  • DOI: https://doi.org/10.1007/978-94-010-0295-0_38

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-3952-9

  • Online ISBN: 978-94-010-0295-0

  • eBook Packages: Springer Book Archive

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