Abstract
We present a novel fabrication method for patterning PDMS thin films on solid surfaces. The method allows microstructures with precise lateral dimensions and heights to be formed using PDMS. We have applied this technology to form microfluidic channel units, reaction chambers, and micro elastic gaskets. This new fabrication method could potentially give rise to an efficient and reliable approach of constructing microfluidic systems.
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© 2002 Springer Science+Business Media Dordrecht
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Ryu, K.S., Liu, C. (2002). Precision Patterning of PDMS Thin Films: A New Fabrication Method and Its Applications. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_37
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DOI: https://doi.org/10.1007/978-94-010-0295-0_37
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3952-9
Online ISBN: 978-94-010-0295-0
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