Abstract
This paper presents a novel microfabrication technology of 3D oblique microstructures by inclined UV lithography with negative photoresist, SU-8. Various 3D oblique microstructures were simply fabricated such as embedded channels, bridges, V-grooves, and so on.
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References
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© 2002 Springer Science+Business Media Dordrecht
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Han, M., Lee, W., Lee, SK., Lee, S.S. (2002). Microfabrication of 3D Oblique Structures by Inclined UV Lithography. In: Baba, Y., Shoji, S., van den Berg, A. (eds) Micro Total Analysis Systems 2002. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0295-0_35
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DOI: https://doi.org/10.1007/978-94-010-0295-0_35
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-3952-9
Online ISBN: 978-94-010-0295-0
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