The Mems Modeling System by Collaboration of Multi-Scale Simulators and Application to the Microreactor

Abstract

We have developed five simulation tools for designing µTAS, a micro electrochemical fluidics chip simulator (named “MEMFluid”)[l], an electrolyte fluid dynamics simulator near boundaries(named “Electrolyte”)[l], a soft actuator (polyelectrolyte gels) simulator (named “SoftDyn”)[2, 3], an optimization tool for properties of micro-channels using GA(genetic algorithm) (named “MEMOpt”), and DNA molecule dynamics simulator in Gel electrophoresis(named “MEMDNA”) [4, 5]. Here, we are aiming to construct the multi-scale modeling tools for MEMS by connecting the total system designer (such as “MEMOpt”), various device simulators (such as “MEMFluid” or “SoftDyn”) and various molecular scale simulators (such as “Electrolyte” or “MEMDNA”).