Abstract
Recently, the new types of the Si-based sensors have been developed for medical and industrial applications. The further improvement of these devices demands a deeper study of silicon surface in real conditions.
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Kiv, A.E., Litovchenko, V.G., Fuks, D., Golovanov, V.V., Lisovskyy, I.P., Maximova, T.I. (2003). Chemical Active Centers at Surfaces of Si-Based Materials. In: Gogotsi, Y.G., Uvarova, I.V. (eds) Nanostructured Materials and Coatings for Biomedical and Sensor Applications. NATO Science Series, vol 102. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0157-1_34
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DOI: https://doi.org/10.1007/978-94-010-0157-1_34
Publisher Name: Springer, Dordrecht
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