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Silicon Crystals for Large Scale Integrated Circuits

  • B. O. Kolbesen
Conference paper
Part of the NATO Advanced Study Institutes Series book series (NSSE, volume 55)

Abstract

Silicon is the basic material of the electronic industry. The considerable continuous growth of this industry brings about a steadily increasing demand for electronic-grade poly-crystalline silicon1, which in 1980 has already exceeded 2000 tons/year (Fig. 1). The major driving force of the electronic industry is integrated circuits, which require high quality large diameter (75–125 mm) single crystalline wafers and ingots.

Keywords

Silicon Crystal Oxygen Defect Floating Zone Denude Zone Wafer Processing 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Martinus Nijhoff Publishers, The Hague 1982

Authors and Affiliations

  • B. O. Kolbesen
    • 1
  1. 1.Siemens AGResearch LaboratoriesMunich 83Fed. Rep. Germany

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