Abstract
VLSI technology is aimed at maximizing the utilization of silicon area, electrical power, and costly production facilities, while providing high functional capability. Integration and miniaturization are the routes by which this is accomplished. Progress in integration and miniaturization involves solving a continual series of technological problems in lithography and chemical process technology.
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© 1982 Martinus Nijhoff Publishers, The Hague
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Keyes, R.W. (1982). LSI: Prospects and Problems. In: Esaki, L., Soncini, G. (eds) Large Scale Integrated Circuits Technology: State of the Art and Prospects. NATO Advanced Study Institutes Series, vol 55. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-7645-0_2
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DOI: https://doi.org/10.1007/978-94-009-7645-0_2
Publisher Name: Springer, Dordrecht
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