Abstract
Over the last ten years, a spectacular breakthrough has been observed in the microprocessor industry. This development was initially aimed to achieve better control of industrial processes and is now being applied on a large scale in the fields of domestic appliances, safety systems, automobiles. Therefore, it looks attractive to make a survey of existing technologies which are used in sensor manufacture and to identify the R & D efforts which have to be made in order to satisfy the future market demand.
In each case the problems to be solved are:
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the reliability of the sensor output
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the non-linearity of the signal
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the inter-dependence of different parameters in multivariant systems (e.g. the effect of the temperature)
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the stability of the sensor (need for calibration, reference and standards)
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the resistance to the environment (corrosion, passivation, etc.)
Thick and thin film technologies are currently involved in the manufacture of sensors. The future demand for sensors of high reliability will require a significant multidisciplinary R & D effort. Following a recent evaluation, the size of the existing market is in the range of 500 mio $. Priority has to be given to the development of optical devices.
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References
W.G. Wolber, K.D. Wise IEEE Trans. Elec. Devices (1979), Vol. EP.26 N° 12, p 1864–1874
M. Okuyama, Y. Matsui, H. Nakano, Y. Hamakawa Ferroelectrics (1981) Vol 33, p 235–241
D.J. Romine (1980), US Patent 4 234 542
T. Yasuo, K. Kenji, K. Takayuki Natl. Tech. Rep. Matsushita Elec. (1979) Vol 25, N° 5 p 1042–1052
R.T. Dirstine, W.O. Gentry, R.N. Blumenthal Am. Ceram. Soc. Bull. (1979) V58, N° 8, p 778–783
E. Hamann, H. Manger SAE Prep. N 770401 (1977)
R. Wilhelm, D. Eddy Am. Ceram. Soc. Bull. (1977), V.56, N° 5, p 509–512
J.E. Anderson, Y.B. Graves J. Electrochem. Soc. (1981) V. 128, N° 2, p 294–300
D.M. Haaland J. Electrochem. Soc. (1980), V.127, N° 4, p 796–804
G. Velasco, J.P. Schnell, M. Croset Proc. Int. Conf. passive component (1982) Paris, p 262–267
W.J. Fleming SAE spec. public (1977), SP-418, p 39–51
J.D. Bode (1978) US Pat. 4080276
M.J. Esper, E.M. Logothetis, J.C. Chu SAE spec. publ. (1979), p 19–27, Paper No 790140
J.P. Dougherty SAE spec. publ. (1979), Paper No 790139
P. Roy, B.E. Bugbee Nucl. Technol. (USA) (1978) Vol 39, 216
BATTELLE GENEVA DEVELOPMENT
R.E. Hetrick, D.K. Hohnke, E.M. Logothetis AIP. Conf. Proc. (1981) Vol 66, p 140–146
G. Paris Conductibility ionic and electronic of oxydes 2n thesis private communication
R.B. Cooper, G.N. Advani, A.G. Jordan J. Electronic Water (1981), Vol 10, N° 3, p 455–472
H. Pink, L. Treitinger, L. Vite Japanese Journal of Applied Physics (1980), Vol 19, N° 3, p 513–517
H. Ogawa, A. Abe, M. Nishikawa, S. Hayakawa J. Elect. Chem. Soc. (1981), Vol 128, N° 9, p 2020–2025
J. Appli. phys. (1982), Vol 53, N° 4, p 2785–7
G.N. Advani, Y. Komen, J. Hasenkopf, A.G. Jordan Sens. Actuators (1981), Vol 2, N° 2, p 139–47
P. Tischer, H. Pink, L. Treitinger Proc. Conf. Solid State Devices (1980), Vol 11, p 513–17
H. Windischmann, P. Mark J. Electrochem. Soc. (1979), V.126, N° 4, p 627–633
T. Nitta, Z. Terada, S. Hayakawa (1977) US Patent 4 015 230
I.R. Lauks, J.N. Zemel IEE Trans Electron Devices (1979), Vol ED26, N° 12, p 1959–1964
T. Kimura, K. Yamamoto, T. Shimizu, S. Yugo Thin solid films (1980), Vol 70, p 351–362
US Engineering Societies Commissions of Energy — DOE (1981)
TECHNOCRAT (1982), Vol 15, N° 5, p 45–46
R.W. West, J.M. Honig Electrical conductivity in ceramics and glass (1974), Vol 2, p 343–452
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© 1984 ECSC, EEC, EAEC, Brussels and Luzembourg
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de Pous, O. (1984). Sensors, Thin Films, Electrodes. In: Kröckel, H., Merz, M., Van Der Biest, O. (eds) Ceramics in Advanced Energy Technologies. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-6424-2_23
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DOI: https://doi.org/10.1007/978-94-009-6424-2_23
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